Image:Wafer flats convention.PNG

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Conventional meaning of flats in semiconductor wafers. Red denotes material that has been removed.

Wafers under 200mm generally have flats indicating crystallographic planes of high symmetry (usually the {110} face) and, in old-fashined wafers (those below about 100mm diameter), the wafer's orientation and doping type. Modern wafers use a notch to convey this information, in order to waste less material. Orientation is important for wafer cleavage, and can affect other structural and electronic properties as well.


Created by uploader Polyparadigm 20 Mar 2005 (UTC), using [1] as a reference. Converted to PNG 30 June 2005.


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